{"created":"2023-05-15T12:25:46.323903+00:00","id":1086,"links":{},"metadata":{"_buckets":{"deposit":"af4c5b50-098f-4e61-ab40-6928c63be675"},"_deposit":{"created_by":4,"id":"1086","owners":[4],"pid":{"revision_id":0,"type":"depid","value":"1086"},"status":"published"},"_oai":{"id":"oai:kait.repo.nii.ac.jp:00001086","sets":["2:16:42:126"]},"author_link":[],"item_10002_biblio_info_7":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2012-03-20","bibliographicIssueDateType":"Issued"},"bibliographicPageEnd":"44","bibliographicPageStart":"41","bibliographicVolumeNumber":"36","bibliographic_titles":[{"bibliographic_title":"神奈川工科大学研究報告.B,理工学編"}]}]},"item_10002_description_19":{"attribute_name":"フォーマット","attribute_value_mlt":[{"subitem_description":"application/pdf","subitem_description_type":"Other"}]},"item_10002_description_5":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"The roughness of diamond surfaces were formed using O2 gas in a reactive ion etching (RIE) system. The electrode materials were used stainless steel (SUS) and MgO sintered ceramic. The diamond samples to be etched are positioned on the power electrode. After etching the diamond samples with O2 plasma, the roughness of diamond surfaces were observed with atomic force microscope (AFM). The breakdown voltages of diamond electrodes were measured under various Ne pressure with a V-Q Lissajous method. The micro-needle array on the diamond surface was fabricated at MgO electrode. The secondary electron emission coefficient in the case of MgO electrode is about two times higher than those in the case of SUS electrode.","subitem_description_language":"en","subitem_description_type":"Abstract"}]},"item_10002_identifier_registration":{"attribute_name":"ID登録","attribute_value_mlt":[{"subitem_identifier_reg_text":"10.34411/00001079","subitem_identifier_reg_type":"JaLC"}]},"item_10002_publisher_8":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"神奈川工科大学"}]},"item_10002_source_id_11":{"attribute_name":"書誌レコードID","attribute_value_mlt":[{"subitem_source_identifier":"AN10074179","subitem_source_identifier_type":"NCID"}]},"item_10002_source_id_9":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"09161902","subitem_source_identifier_type":"PISSN"}]},"item_10002_version_type_20":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_version_resource":"http://purl.org/coar/version/c_970fb48d4fbd8a85","subitem_version_type":"VoR"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"比嘉, 司","creatorNameLang":"ja"}]},{"creatorNames":[{"creatorName":"小野, 志門","creatorNameLang":"ja"}]},{"creatorNames":[{"creatorName":"三栖, 貴行","creatorNameLang":"ja"}]},{"creatorNames":[{"creatorName":"後藤, みき","creatorNameLang":"ja"}]},{"creatorNames":[{"creatorName":"荒井, 俊彦","creatorNameLang":"ja"}]},{"creatorNames":[{"creatorName":"Higa, Tsukasa","creatorNameLang":"en"}]},{"creatorNames":[{"creatorName":"Ono, Shimon","creatorNameLang":"en"}]},{"creatorNames":[{"creatorName":"Misu, Takayuki","creatorNameLang":"en"}]},{"creatorNames":[{"creatorName":"Goto, Miki","creatorNameLang":"en"}]},{"creatorNames":[{"creatorName":"Arai, Toshihiko","creatorNameLang":"en"}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2013-09-06"}],"displaytype":"detail","filename":"kkb-036-007.pdf","filesize":[{"value":"12.5 MB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"kkb-036-007.pdf","objectType":"fulltext","url":"https://kait.repo.nii.ac.jp/record/1086/files/kkb-036-007.pdf"},"version_id":"777d7647-b994-496f-9b3f-49b9cdfea9cf"}]},"item_keyword":{"attribute_name":"キーワード","attribute_value_mlt":[{"subitem_subject":"secondary electron emission","subitem_subject_language":"en","subitem_subject_scheme":"Other"},{"subitem_subject":"diamond electrode","subitem_subject_language":"en","subitem_subject_scheme":"Other"},{"subitem_subject":"micro-needle array","subitem_subject_language":"en","subitem_subject_scheme":"Other"},{"subitem_subject":"V-Q Lissajous","subitem_subject_language":"en","subitem_subject_scheme":"Other"},{"subitem_subject":"MgO","subitem_subject_language":"en","subitem_subject_scheme":"Other"},{"subitem_subject":"breakdown voltage","subitem_subject_language":"en","subitem_subject_scheme":"Other"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"departmental bulletin paper","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"バックスパッタによる微細針状ダイヤモンド電極の表面形状と二次電子放出特性","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"バックスパッタによる微細針状ダイヤモンド電極の表面形状と二次電子放出特性","subitem_title_language":"ja"},{"subitem_title":"Surface morphology and secondary electron emission property of micro-needle structured diamond electrode fabricated by back sputtering","subitem_title_language":"en"}]},"item_type_id":"10002","owner":"4","path":["126"],"pubdate":{"attribute_name":"PubDate","attribute_value":"2020-11-24"},"publish_date":"2020-11-24","publish_status":"0","recid":"1086","relation_version_is_last":true,"title":["バックスパッタによる微細針状ダイヤモンド電極の表面形状と二次電子放出特性"],"weko_creator_id":"4","weko_shared_id":-1},"updated":"2023-08-04T09:22:14.904293+00:00"}