{"created":"2023-05-15T12:25:31.134598+00:00","id":811,"links":{},"metadata":{"_buckets":{"deposit":"e2e4457a-4a89-4739-a303-094cbff77650"},"_deposit":{"created_by":4,"id":"811","owners":[4],"pid":{"revision_id":0,"type":"depid","value":"811"},"status":"published"},"_oai":{"id":"oai:kait.repo.nii.ac.jp:00000811","sets":["2:16:41:112"]},"author_link":[],"item_10002_biblio_info_7":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"1998-03-20","bibliographicIssueDateType":"Issued"},"bibliographicPageEnd":"71","bibliographicPageStart":"67","bibliographicVolumeNumber":"22","bibliographic_titles":[{"bibliographic_title":"神奈川工科大学研究報告.B,理工学編"}]}]},"item_10002_description_19":{"attribute_name":"フォーマット","attribute_value_mlt":[{"subitem_description":"application/pdf","subitem_description_type":"Other"}]},"item_10002_description_5":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"The pulse photoconductivity amplitude (PPCA) technique with blue laser carrier excitation is proposed\nfor characterizing subsurface property in Si wafers.T he PPCA signals is concluded to malce possible to\ncharacterize subsurface damages introduced by mirror polishing, from the discussion of the correlation\nbetween micro roughness dependence ofP PCA, initial carrier lifetime,a nd heavy metals contamination.","subitem_description_language":"en","subitem_description_type":"Abstract"}]},"item_10002_identifier_registration":{"attribute_name":"ID登録","attribute_value_mlt":[{"subitem_identifier_reg_text":"10.34411/00000804","subitem_identifier_reg_type":"JaLC"}]},"item_10002_publisher_8":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"神奈川工科大学"}]},"item_10002_source_id_11":{"attribute_name":"書誌レコードID","attribute_value_mlt":[{"subitem_source_identifier":"AN10074179","subitem_source_identifier_type":"NCID"}]},"item_10002_source_id_9":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"09161902","subitem_source_identifier_type":"PISSN"}]},"item_10002_version_type_20":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_version_resource":"http://purl.org/coar/version/c_970fb48d4fbd8a85","subitem_version_type":"VoR"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"澤登, 剛","creatorNameLang":"ja"}]},{"creatorNames":[{"creatorName":"荻田, 陽一郎","creatorNameLang":"ja"}]},{"creatorNames":[{"creatorName":"Sawanobori, Takeshi","creatorNameLang":"en"}]},{"creatorNames":[{"creatorName":"Ogita, Yo-ichiro","creatorNameLang":"en"}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2010-02-03"}],"displaytype":"detail","filename":"kkb-022-012.pdf","filesize":[{"value":"1.8 MB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"kkb-022-012.pdf","objectType":"fulltext","url":"https://kait.repo.nii.ac.jp/record/811/files/kkb-022-012.pdf"},"version_id":"5607f0ce-6dbb-42aa-8212-9a5117cb7d14"}]},"item_keyword":{"attribute_name":"キーワード","attribute_value_mlt":[{"subitem_subject":"PPCA signal,S ubsurface property,S ubsurface damage,P hotoconductivity,Mi rror\\npolishing, Si wafer","subitem_subject_language":"en","subitem_subject_scheme":"Other"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"departmental bulletin paper","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"青色レーザ/マイクロ波光導電を用いたシリコンウェーハ表面層の評価","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"青色レーザ/マイクロ波光導電を用いたシリコンウェーハ表面層の評価","subitem_title_language":"ja"},{"subitem_title":"Subsurface Characterization of Silicon Wafers with Blue Laster/Microwave Photoconductivity Transient","subitem_title_language":"en"}]},"item_type_id":"10002","owner":"4","path":["112"],"pubdate":{"attribute_name":"PubDate","attribute_value":"2020-11-24"},"publish_date":"2020-11-24","publish_status":"0","recid":"811","relation_version_is_last":true,"title":["青色レーザ/マイクロ波光導電を用いたシリコンウェーハ表面層の評価"],"weko_creator_id":"4","weko_shared_id":-1},"updated":"2023-08-18T03:23:43.963501+00:00"}