{"created":"2023-05-15T12:25:34.087918+00:00","id":867,"links":{},"metadata":{"_buckets":{"deposit":"a285f292-006a-4ef6-a5c8-ce54548383b9"},"_deposit":{"created_by":4,"id":"867","owners":[4],"pid":{"revision_id":0,"type":"depid","value":"867"},"status":"published"},"_oai":{"id":"oai:kait.repo.nii.ac.jp:00000867","sets":["2:16:41:114"]},"author_link":[],"item_10002_biblio_info_7":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2000-03-20","bibliographicIssueDateType":"Issued"},"bibliographicPageEnd":"178","bibliographicPageStart":"171","bibliographicVolumeNumber":"24","bibliographic_titles":[{"bibliographic_title":"神奈川工科大学研究報告.B,理工学編"}]}]},"item_10002_description_19":{"attribute_name":"フォーマット","attribute_value_mlt":[{"subitem_description":"application/pdf","subitem_description_type":"Other"}]},"item_10002_description_5":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"In order to clarify the sputtered species from a target, a quadrupole mass spectrometer system evacuated differentially was developed. A copper metal target was sputtered to test this system. The system detected 63Cu and 65Cu of copper isotopes in mass spectra. The observed ratio of 63Cu and 65Cu was 7:3, which was close to the value of 69:31, the natural abundance of 63Cu and 65Cu. This result showed that the system could detect Cu atoms sputtered from Cu metal target. In the case of an YBa2Cu3Ox oxide target, the system detected Y, Ba and Cu signals. However, the observed signals of Ba or Cu isotopes were almost the same intensities, contrary to the expected values of the natural abundance of Ba or Cu. The observed signal was not due to sputtered species from the oxide target.","subitem_description_language":"en","subitem_description_type":"Abstract"}]},"item_10002_identifier_registration":{"attribute_name":"ID登録","attribute_value_mlt":[{"subitem_identifier_reg_text":"10.34411/00000860","subitem_identifier_reg_type":"JaLC"}]},"item_10002_publisher_8":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"神奈川工科大学"}]},"item_10002_source_id_11":{"attribute_name":"書誌レコードID","attribute_value_mlt":[{"subitem_source_identifier":"AN10074179","subitem_source_identifier_type":"NCID"}]},"item_10002_source_id_9":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"09161902","subitem_source_identifier_type":"PISSN"}]},"item_10002_version_type_20":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_version_resource":"http://purl.org/coar/version/c_970fb48d4fbd8a85","subitem_version_type":"VoR"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"万代, 敏夫","creatorNameLang":"ja"}]},{"creatorNames":[{"creatorName":"Bandai, Toshio","creatorNameLang":"en"}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2010-02-03"}],"displaytype":"detail","filename":"kkb-024-023.pdf","filesize":[{"value":"2.6 MB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"kkb-024-023.pdf","objectType":"fulltext","url":"https://kait.repo.nii.ac.jp/record/867/files/kkb-024-023.pdf"},"version_id":"be31c6dd-e804-4b3b-93a5-6a6775e50635"}]},"item_keyword":{"attribute_name":"キーワード","attribute_value_mlt":[{"subitem_subject":"high-temperature superconductor","subitem_subject_language":"en","subitem_subject_scheme":"Other"},{"subitem_subject":"sputter deposition","subitem_subject_language":"en","subitem_subject_scheme":"Other"},{"subitem_subject":"thin films","subitem_subject_language":"en","subitem_subject_scheme":"Other"},{"subitem_subject":"quadrupole mass spectrometer","subitem_subject_language":"en","subitem_subject_scheme":"Other"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"eng"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"departmental bulletin paper","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"Sputtered Species from Cu and YBa2Cu3Ox Targets Studied by Quadrupole Mass Spectrometer","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"Sputtered Species from Cu and YBa2Cu3Ox Targets Studied by Quadrupole Mass Spectrometer","subitem_title_language":"en"}]},"item_type_id":"10002","owner":"4","path":["114"],"pubdate":{"attribute_name":"PubDate","attribute_value":"2020-11-24"},"publish_date":"2020-11-24","publish_status":"0","recid":"867","relation_version_is_last":true,"title":["Sputtered Species from Cu and YBa2Cu3Ox Targets Studied by Quadrupole Mass Spectrometer"],"weko_creator_id":"4","weko_shared_id":-1},"updated":"2023-08-04T09:02:30.460307+00:00"}