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Sputtered Species from Cu and YBa2Cu3Ox Targets Studied by Quadrupole Mass Spectrometer
https://doi.org/10.34411/00000860
https://doi.org/10.34411/00000860f5bbe228-2625-4dc4-8312-ccc86015a158
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
kkb-024-023.pdf (2.6 MB)
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| Item type | 紀要論文 / Departmental Bulletin Paper(1) | |||||||||
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| 公開日 | 2020-11-24 | |||||||||
| タイトル | ||||||||||
| タイトル | Sputtered Species from Cu and YBa2Cu3Ox Targets Studied by Quadrupole Mass Spectrometer | |||||||||
| 言語 | en | |||||||||
| 言語 | ||||||||||
| 言語 | eng | |||||||||
| キーワード | ||||||||||
| 言語 | en | |||||||||
| 主題Scheme | Other | |||||||||
| 主題 | high-temperature superconductor | |||||||||
| キーワード | ||||||||||
| 言語 | en | |||||||||
| 主題Scheme | Other | |||||||||
| 主題 | sputter deposition | |||||||||
| キーワード | ||||||||||
| 言語 | en | |||||||||
| 主題Scheme | Other | |||||||||
| 主題 | thin films | |||||||||
| キーワード | ||||||||||
| 言語 | en | |||||||||
| 主題Scheme | Other | |||||||||
| 主題 | quadrupole mass spectrometer | |||||||||
| 資源タイプ | ||||||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||||||
| 資源タイプ | departmental bulletin paper | |||||||||
| ID登録 | ||||||||||
| ID登録 | 10.34411/00000860 | |||||||||
| ID登録タイプ | JaLC | |||||||||
| 著者 |
万代, 敏夫
× 万代, 敏夫
× Bandai, Toshio
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| 抄録 | ||||||||||
| 内容記述タイプ | Abstract | |||||||||
| 内容記述 | In order to clarify the sputtered species from a target, a quadrupole mass spectrometer system evacuated differentially was developed. A copper metal target was sputtered to test this system. The system detected 63Cu and 65Cu of copper isotopes in mass spectra. The observed ratio of 63Cu and 65Cu was 7:3, which was close to the value of 69:31, the natural abundance of 63Cu and 65Cu. This result showed that the system could detect Cu atoms sputtered from Cu metal target. In the case of an YBa2Cu3Ox oxide target, the system detected Y, Ba and Cu signals. However, the observed signals of Ba or Cu isotopes were almost the same intensities, contrary to the expected values of the natural abundance of Ba or Cu. The observed signal was not due to sputtered species from the oxide target. | |||||||||
| 言語 | en | |||||||||
| 書誌情報 |
神奈川工科大学研究報告.B,理工学編 巻 24, p. 171-178, 発行日 2000-03-20 |
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| 出版者 | ||||||||||
| 出版者 | 神奈川工科大学 | |||||||||
| ISSN | ||||||||||
| 収録物識別子タイプ | PISSN | |||||||||
| 収録物識別子 | 09161902 | |||||||||
| 書誌レコードID | ||||||||||
| 収録物識別子タイプ | NCID | |||||||||
| 収録物識別子 | AN10074179 | |||||||||
| フォーマット | ||||||||||
| 内容記述タイプ | Other | |||||||||
| 内容記述 | application/pdf | |||||||||
| 著者版フラグ | ||||||||||
| 出版タイプ | VoR | |||||||||
| 出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||||||
